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Drilling high aspect ratio holes by femtosecond laser filament with aberrations

Frontiers of Optoelectronics
June 2021

A near-infrared femtosecond laser is focused by a 100 mm-focal-length plano-convex lens to form a laser filament, which is employed to drill holes on copper targets. By shifting or rotating the focusing lens, additional aberration is imposed on the focused laser beam, and significant influence is produced on the aspect ratio and cross-sectional shape of the micro-holes.

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Method for improving femtosecond laser drilling efficiency and drilling thickness of metal material

Patentscope

May 2021

The invention discloses a method for improving femtosecond laser drilling efficiency and drilling thickness of a metal material. The method is used for solving the problem that energy utilization efficiency is reduced due to air ionization caused by large pulse energy and extremely high energy density in femtosecond laser drilling of thick metal materials at the present stage.

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Drilling device with controllable femtosecond laser processing taper and drilling process thereof

European Patent Office
October 2021

A drilling device with a controllable femtosecond laser processing taper includes a femtosecond laser and a precision motion table. A support mechanism is provided along the central axis of the precision motion table, and a clamp is provided on the top of the support mechanism.

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